Ruthenium Target

Antioxidant, corrosion-resistant, thiab uniformly zaj duab xis- sib sau, muab ib tug heev txhim khu kev qha nyias- zaj duab xis deposition tov rau semiconductor thiab cov ntaub ntawv cia daim ntaub ntawv.

Lub hom phiaj ruthenium sputtering yog ib pawg platinum noble hlau sputtering lub hom phiaj fabricated los ntawm siab -purity ruthenium (Ru) los ntawm refining, melting, forging, thiab precision machining. Nws yog feem ntau siv rau hauv lub cev vapor deposition (PVD) magnetron sputtering txheej txheem. Cov khoom no nta lub siab melting point, siab hardness, zoo heev oxidation tsis kam, thiab tshuaj stability, enabling zus tau tej cov uniform thiab ntom ruthenium films. Nws pom cov ntawv siv dav hauv cov khoom siv hluav taws xob siab tshaj plaws, kev sib koom ua ke hauv Circuit Court interconnects, diffusion barrier txheej, thiab cov ntaub ntawv khaws cia thiab cov khoom siv.

Xa kev nug

Product Description

Lub hom phiaj ntawm ruthenium no yog tsim los ntawm siab -purity ruthenium raw cov ntaub ntawv, ua tau raws li siab ceev thiab uniform microstructure los ntawm arc melting thiab grain refinement txheej txheem. Cov khoom lag luam muaj nyob rau hauv ntau yam kev teeb tsa, suav nrog cov phiaj xwm phiaj xwm thiab cov phiaj xwm tig, thiab txhawb nqa indium-binding/Elastic Body-binding backplate services, ua rau lawv haum rau DC sputtering daim ntawv thov.

Feature

High purity, qib pa, muaj nyob rau hauv ultra-siab purity specifications.
High hardness, zoo heev hnav tsis kam, thiab superior oxidation thiab corrosion kuj.

Siab melting point ntau heev nrog zoo heev - kub stability.
The film exhibits uniform deposition and high density, making it suitable for advanced semiconductor manufacturing processes.

Specifications thiab Qauv

Rau customized qhov ntev, thickness, purity, los yog technical specifications, thov koj xav tiv tauj peb. Peb tuaj yeem muab cov kev daws teeb meem raws li koj cov khoom siv sputtering, txheej txheej yuav tsum tau ua, thiab qhov loj me.

Classification Dimension	Yam khoom	Cov yam ntxwv tseem ceeb
Qib Purity	Cov qib purity sib txawv	General -Lub hom phiaj rau cov khoom siv hluav taws xob, cov khoom siv, thiab cov khoom siv nco.
Khoom hom	Circular planar ruthenium phiaj	Standard specifications, sib xws nrog feem ntau sputtering khoom.
	Rectangular/Block-zoo li lub hom phiaj ruthenium	Haum rau loj - thaj tsam daim ntawv thov txheej.
	Rotating ruthenium phiaj	Haum rau qhov loj - cheeb tsam, siab - efficiency deposition.

Daim ntawv thov

Semiconductors: DRAM / MIM capacitor electrodes, interconnect diffusion barrier txheej.
Advanced Storage: Sib Nqus Cia, Theem -Hloov Nco, Resistive Memory.
Integrated Circuit: Copper Interconnect Seed Layer, Barrier Layer, thiab Logic Device.
Cov khoom siv pom: tiaj tus- vaj huam sib luag qhia, OLED nyias- zaj duab xis electrodes.
Optoelectronics thiab Photovoltaics: Optical Coatings, Functional Layers of Photovoltaic Cells.
Precision Electronics: Hnav- tiv thaiv hluav taws xob tiv tauj, tuab- zaj duab xis resistors, sensors.

Cim npe nrov: Tuam Tshoj ruthenium phiaj manufacturers, lwm tus neeg, Hoobkas